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Microwave Driven Jet: MIDJet™

Microwave Torch Technology

Scalable, high enthalpy, clean and versatile plasma source

PSI’s MIDJet™ is a versatile, efficient and scalable plasma torch technology capable of producing heated gas (1000 – 6000 K) at very high source gas flow rates from a clean, electrodeless microwave discharge. Microwave power is coupled into the torch from a conventional microwave subsystem through a coaxial input into the plasma chamber producing a plasma confined by swirl flow induced by the source gas. The typically high pressure plasma expands through a ceramic output nozzle producing a supersonic jet expanding into either vacuum or the atmosphere. PSI currently offers complete systems, including the torch, microwave generator and control subsystem, that operate in the range: 1 – 100 kW.

MidJet

Key Features

Microwave Power: 1–10 kW/2.45 GHz, 10–100 kW/915 MHz
Enthalpy: 1 – 14 MJ/kg with Air and N₂ demonstrated
Plasma Temperature: 1000 – 6000 K, dependent on enthalpy
High efficiency: 90+% of microwave power coupled in plasma
Plasma Pressure: 0.02 – 10 atm., depends on gas flow, nozzle diameter and downstream pressure
Downstream Pressure: 0.0001 – 1 atm, depends on pump
Demonstrated Source Gas (pure + mixed): Air, N₂, O₂, N₂O, H₂O, CH₄, CF₄, SF₆, NF₃, F₂, H₂, He, H₂S, SiF₄
NH3 Contamination “Free”: Meets semiconductor industry reqs.