Products > Space & Missile Test Services & Systems > MIDJET

MIcrowave Driven Jet: MIDJet™

Microwave Torch Technology

Scalable, high enthalpy, clean and versatile plasma source

PSI’s MIDJetTM is a versatile, efficient and scalable plasma torch technology capable of producing heated gas (1000 – 6000 K) at very high source gas flow rates from a clean, electrodeless microwave discharge. Microwave power is coupled into the torch from a conventional microwave subsystem through a coaxial input into the plasma chamber producing a plasma confined by swirl flow induced by the source gas. The typically high pressure plasma expands through a ceramic output nozzle producing a supersonic jet expanding into either vacuum or the atmosphere. PSI currently offers complete systems, including the torch, microwave generator and control subsystem, that operate in the range: 1 – 100 kW.

MitJet

Key Features

  • Microwave Power: 1–10 kW/2.45 GHz, 10–100 kW/915 MHz
  • Enthalpy: 1 – 14 MJ/kg with Air and N2 demonstrated
  • Plasma Temperature: 1000 – 6000 K, dependent on enthalpy
  • High efficiency: 90+% of microwave power coupled in plasma
  • Plasma Pressure: 0.02 – 10 atm., depends on gas flow, nozzle diameter and downstream pressure
  • Downstream Pressure: 0.0001 – 1 atm, depends on pump
  • Demonstrated Source Gas (pure + mixed): Air, N2, O2, N2O, H2O, CH4, CF4, SF6, NF3, F2, H2, He, H2S, SiF4
  • NH3 Contamination “Free”: Meets semiconductor industry reqs.
PSI MIDJetTM-2000 system consisting of a microwave torch, 2 kW 2.45 GHz microwave subsystem and controller

Benefit to Customer

High efficiency, high enthalpy, clean plasma source to support applications including:

1) high temperature materials testing

2) High fluence atom/radical source for etching, cleaning and chemical vapor deposition

3) waste stream processing, e.g. ammonia, hydrogen sulfide, and methane reforming

MIDJet™-2000 spec sheet

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