|
Abstract: A MEMS Singlet Oxygen Generator—Part II:
Experimental Exploration of the Performance Space
Tyrone F. Hill, Luis Fernando Velasquez-Garcia, Benjamin A. Wilhite, W. Terry Rawlins, Seonkyung Lee, Steven J. Davis, Klavs F. Jensen, Alan H. Epstein, Carol Livermore,
"A MEMS Singlet Oxygen Generator—Part II:
Experimental Exploration of the Performance Space
,"
IEEE Journal of Microelectromechanical Systems
16
(6)
, 1492-1505
(December2007).
Copyright © 2007 Institute of Electrical and Electronics Engineers. Reprinted from
IEEE Journal of Microelectromechanical Systems
16 (6), 1492-1505 (2007).
This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply
IEEE endorsement of any of PSI's products or services. Internal or personal use of this material is permitted. However, permission
to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or
redistribution must be obtained from the IEEE by sending a blank e-mail message to
info.pub.permission@ieee.org.
Abstract
Abstract—This paper reports the quantitative experimental exploration of the performance space of a microfabricated singlet oxygen generator (µSOG). SOGs are multiphase reactors that mix H2O2, KOH, and Cl2 to produce singlet delta oxygen, or O2(a). A scaled-down SOG is being developed as the pump source for a microfabricated chemical oxygen-iodine laser system because scaling down a SOG yields improved performance compared to the macroscaled versions. The performance of the µSOG was characterized using O2(a) yield, chlorine utilization, power in the flow, molar flow rate per unit of reactor volume, and steady-state operation as metrics. The performance of the µSOG is measured through a series of optical diagnostics and mass spectrometry. The test rig, which enables the monitoring of temperatures, pressures, and the molar flow rate of O2(a), is described in detail. Infrared spectra and mass spectrometry confirm the steady-state operation of the device. Experimental results reveal O2(a) concentrations in excess of 1017 cm−3, O2(a) yield at the chip outlet approaching 80%, and molar flow rates of O2(a) per unit of reactor volume exceeding 600 X 10−4 mol/L/s.
sr-1319
|
