MID-Jet™ 2000/5000

MID-Jet™ 2000/5000
A High-Flux Source of Atomic Species

MID-Jet™ 2000 for fluorine and oxygen. The output flange is 15 cm in diameter. At 2 kW, the torch produces a flux of 6 x 1021/s of atomic fluorine with a temperature of about 1500 K

The MID-Jet™ 2000 is a microwave-driven plasma torch capable of producing ~10²¹/second of atomic O and F. Fluorine can be produced starting with SF₆ or NF₃. Atomic beams of H, Cl, N and I have also been demonstrated with the MID-Jet™. The torch has been developed for semiconductor applications where high purity, neutral gas flows are required. It is designed to operate in vacuum or air.

Current applications of the MID-Jet™ include: 1) high rate photoresist stripping with atomic oxygen or atomic hydrogen, 2) high fluence halogen beams for silicon wafer thinning and semiconductor process chamber cleaning, 3) high rate, high purity CVD of materials over large areas, and 4) reactant generation for high power chemical lasers.

The torch can be supplied as a turn-key system including the torch head, microwave power supply and controller, or alone for use in an existing microwave system. The standard model includes a mechanically set flow, with manual or remote on/off. No user adjustments are required during operation. Operation is continuous.

Materials subject to contact with the microwave discharge are 0.995 alumina and aluminum nitride. Materials in contact with the gas only are 6061 Aluminum, stainless steel, Teflon™, and Viton^® O-rings.

The MID-Jet™ 5000 is also available for producing beams with discharge powers up to 5 kW. The gas flows and atomic fluence for the MID-Jet™ 5000 are about 2.5 times greater than those listed below for the MID-Jet™ 2000.

Specifications

Microwave Power		1 kW - 2 kW (MID-Jet™ 2000)
Output Flux @ 2 kW
	Fluorine Atoms	6 x 1021/second (nominal)
	Oxygen Atoms	6 x 1020/second (nominal)
Input Gases
	Oxygen	11 slm at 45 psig
	SF6	3.5 slm at 45 psig
Cooling Water		1 gal/min at 45 psig
Input Power		15.5 A at 230 VAC
Mechancial
	Microwave Power Head and Torch	See attached figure
	HV Power Supply	19 in. rack mount, 15 in. deep, 3.5 in. high, 28 lb
	Controller	19 in. rack mount, 22 in. deep, 7 in. high, 20 lb.

Specifications subject to change.

 

MID-Jet™ 2000 in a typical configuration, with, from left to right: torch head, coupler to rectangular waveguide, "elbow," isolator, and microwave power head. The system can be reconfigured by eliminating the elbow, moving it between the microwave head and the isolator, or by adding either rigid or flexible waveguide between any of the rectangular waveguide components. The high voltage power supply and the control panel are rack-mounted.

Outline drawing of Mid-Jet™ 2000 torch body. All dimensions are in inches. The output flange, shown on the right, can be configured to meet customer requirements.

David Oakes Physical Sciences Inc. 20 New England Business Center Andover, MA 01810 Telephone: (978) 689-0003 Fax: (978) 689-3232 oakes@psicorp.com